Veolia Water Technologies & Solutions

Microelectronics

Consistent ultrapure water (UPW) production is critical for microelectronics manufacturing. At Veolia, we understand the importance of providing the most reliable, high quality, cost effective solutions while never compromising on safety or environmental stewardship With our experience, capabilities, and commitment to environmental stewardship, we are the trusted partner for water and wastewater treatment solutions in the microelectronics industry.

Microelectronics

Consistent ultrapure water (UPW) production is critical for microelectronics manufacturing. At Veolia, we understand the importance of providing the most reliable, high quality, cost effective solutions while never compromising on safety or environmental stewardship With our experience, capabilities, and commitment to environmental stewardship, we are the trusted partner for water and wastewater treatment solutions in the microelectronics industry.

Ultrapure Water, Wastewater Reuse & Zero Liquid Discharge Solutions for Microelectronics

Veolia provides a comprehensive portfolio of water, wastewater reuse and zero liquid discharge solutions for the microelectronics industry. Our team has over 40 years of direct microelectronics experience, 390+ successfully executed large projects in over a dozen countries for more than 50 clients. Our vision to anticipate and develop the solutions for tomorrow’s challenges starts with the rigorous testing of today’s most advanced technologies and this is why Veolia is a trusted partner for the microelectronics industry.

  • Ultrapure Water Treatment: We provide comprehensive ultrapure water treatment solutions (design, equipment, services, operations, consumables, spare parts, etc.) to maintain the highest level of water purity required to meet and exceed the specifications of current (PPT) and future (PPQ) advanced node manufacturing.
  • Segregated Wastewater Treatment & Reuse: During the microelectronics manufacturing process, a lot of chemicals are used. As a result, wastewater from microelectronics plants contains contaminants that can’t be discharged. Veolia can optimize the output of each process, resulting in improved yields and manufacturing cost reductions and also filtering contaminants out of the effluent, waste disposal costs can be significantly reduced, and clean permeate can be reused, resulting in additional savings and environmental protection.
  • End-of-Pipe (EOP) Zero Liquid Discharge Systems: 
    • Equalization and Peroxide Quench - hardness and silica removal, solids to belt/filter press
    • Biological Treatment - Biological Nutrient Removal, Membrane Bioreactor - organics and solids removal, sludge sent to screw/belt press
    • Reclaim with ion exchange, forced draft or membrane degasification, high pH RO, ultra-high-pressure RO (UHPRO), low salt rejection RO (LSRRO) or osmotically assisted RO (OARO) with permeate recycle/reuse
    • Thermal ZLD - brine concentration and/or crystallization followed by centrifuge
  • Utilities: Veolia offers solutions for Cooling Towers, PVAC, PCW, Chill/Hot Loops, Boilers, Memchem, Pre/Post-treatment.
  • Emergency Mobile & Temporary Bridge Solutions, Operations Services, Asset Care & Expert Guidance: provide flexible solutions to the microelectronics industry such as maintenance and service contracts, design, project management, installation, and repair of Reverse Osmosis (RO), and Ultraviolet (UV) systems and components, RO membrane cleaning and water system sanitizing, media replacement and re-beds (carbon, ion exchange resin), Instrument repair and calibration, pure water membranes, filters, cartridges, and chemicals. Our services can be delivered on an emergency or longer-term basis to provide ultrapure water, demineralized water or even electrodeionization water treatment.as need on demand
  • Instruments & Controls: Online, portable and laboratory total organic carbon (TOC) analyzers provide ultra-accurate analysis of microelectronics water and wastewater streams to detect contamination in the UPW loop or UPW make-up, detect fabrication chemicals and to perform reclaim monitoring and diagnostics testing.

Overview

 Microelectronic applications

Veolia specializes in building holistic and integrated solutions for the microelectronics industry. We have solutions for water, wastewater and waste treatment.

 

diagram

 

Applications

Microelectronic applications

  • Ultrapure Water Treatment systems which includes technologies for
    • Make-up: multimedia filtration, activated carbon filters, ultrafiltration for RO pretreatment, two pass RO/high pH RO
    • Primary: Primary UV, Electrodeionization, primary mixed bed filtration, gas transfer membranes for O2 removal Polishing:
    • Polishing UV, chiller and polishing mixed bed filtration and ultrafiltration
    • Hot UPW: hot UPW booster pumps, heat recovery exchanger and hot ultrafiltration.
  • Wastewater Reuse/Reclaim systems treating for pH neutralisation, TOC/BOD/LOD reduction, suspended solids removal, ammonia reduction, phosphate reduction, copper removal, fluoride removal, arsenic removal CMP effluent treatment and microfiltration. These processes offer onsite wastewater reuse opportunities for:
    • Process water
    • Ultrapure water
    • Once-through cooling
    • Boiler feedwater
    • Other utility water needs such as washing, cleainign fire production, irrigation
  • End-of-Pipe (EOP) Zero Liquid Discharge Systems
    • Equalization and Peroxide Quench – hardness and silica removal, solids to belt/filter press
    • Biological Treatment Biological Nutrient Removal, Membrane Bioreactor - organics and solids removal, sludge sent to screw/belt press
    • Reclaim with ion exchange, forced draft degasification, high pH RO - permeate recycle/reuse and brine concentration
    • Thermal ZLD - brine concentration, crystallization followed by centrifuge

Heavy Metals Removal

Regulations for heavy metal effluent limits are becoming stricter as the industry…

Monitoring Systems

By monitoring your industrial water and wastewater processes, you can protect assets,…

Products & Services

Products and services for the microelectronics industry

Ultrapure Water Treatment systems

 

  • Feedwater storage tanks
  • Feedwater transfer pumps
  • Blend water filtration
  • Activated or catalytic carbon
  • Feedwater heat exchanger
  • Weak acid cation softeners
  • High pH RO system
  • RO permeate storage tanks
  • Primary distribution pumps
  • Primary membrane degasifier
  • Primary TOC reduction UV
  • Electrodeionization system
  • Primary IS columns
  • Primary post-filtration
  • UPW storage tanks
  • Polish distribution pumpsaste
  • Polish membrane degasifier
  • Polis TOC reduction UV
  • Polish chilling heat exchanger
  • Polish IX columns
  • Polish pre-final filtration
  • Polish final filtration or UF
  • Polish return TOC reduction UV
  • Polish return filtration
  • PLC controls and HMI systems
  • Instrumentation package
  • Analytical package
  • Data trending package

Wastewater Reuse & ZLD

  • Moving Bed Bioreactor (MBBR)
  • Membrane Biorector (MBR)
  • High Rate Softening and Clarification
  • Polishing
  • High pH RO
  • Degasification
  • Ultra-High-Pressure RO (UHPRO)
  • Low Salt Rejection RO (LSRRO) / Osmotically Assisted RO (OARO)
  • Thermal evaporators and crystallizers

 

Consumables/Asset Care

  • Antiscalant, antifoam, coagulant/flocculant, membrane cleaners
  • Spare parts
  • MBR membrane cassettes
  • Expert guidance
  • Antiform & biocides
  • Spare parts
  • MBBR media

 

 

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Case Studies